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> Edwards E09602000 scancoat six sputter coater
Edwards E09602000 scancoat six sputter coater
FOR MORE INFORMATION PLEASE SEE PDF: http://www.invac.ru/catalogue/pdfs/14-Vacuum%20coating.pdf
SCANCOAT SIX SEM SPUTTER COATER
The Scancoat Six is a compact and inexpensive bench-top sputter coater designed to prepare specimens for conventional scanning electron microscopy (SEM). The system is easy-to-use and will sputter coat a wide variety of specimens with a high quality, conductive metal film. The films are deposited uniformly, even over re-entrant surfaces. An optional carbon fiber accessory allows specimens to be carbon coated before X-ray microanalysis.
Automatic sputtering with digital process timer for easy and repeatable operation
Cool sputtering prevents heat damage of delicate specimens
Wide range of easily interchangeable targets
Target to worktable separation easily adjusted from outside the chamber
Built-in sputter etch/cleaning facility
Universal specimen holder accommodates specimen stubs from most EM manufacturers
Supplied with rotary pump, 0.1 mm gold target and built-in feedthrough for film thickness monitor
The Scancoat Six has comprehensive instrumentation and process controls that enable the sputtering time, sputtering power and argon gas flow into the chamber to be preset. The sputtering sequence is then automatically initiated at the press of the Start button, making the Scancoat easy-to-use and providing reproducible run-to-run coatings. Cool Sputter Coating The Scancoat Six is designed to prevent overheating of delicate specimens during sputter deposition. The unique sputtering electrode design incorporates an electron deflection system that reduces specimen bombardment by secondary electrons, minimizing specimen heating. The water-cooled copper specimen table acts as an effective heat sink and provides an extra level of protection against specimen heating.
Sputter Etching/Cleaning Facility
When switched into Etch mode, specimens can be sputter etched or cleaned. Sputter etching can improve the contrast of some specimen types. Non-delicate specimens can be cleaned by the removal of surface water to improve the adhesion of subsequently sputtered films. This accessory is a carbon fiber evaporation source mounted on a chamber top plate and a power supply module. The chamber top plate fits directly onto the Scancoat chamber in place of the sputtering top plate. A support on the power supply module holds the chamber top plate when not in use, freeing both hands for carbon fiber loading. Operation is simple with an outgassing power setting for heating the film . A shutter is provided to protect specimens from radiated heat during outgassing. A push button enables full power to be applied to the fiber to flash evaporate carbon fiber. Each accessory is supplied with 3 m of carbon fiber.
Optical Interference Microscopy Accessories
With the appropriate accessories, the Scancoat Six can be used to prepare standard metallurgical samples for optical interference film microscopy. Iron oxide films can be sputtered in an oxygen atmosphere and specimens can be etched prior to deposition, to enhance grain boundaries.
