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> Mks type 1179A mass flow controller H2 gas 500 sccm mfc
Mks type 1179A mass flow controller H2 gas 500 sccm mfc
MKS Type 1179A Mass Flow Controller H2 Gas 500 SCCM MFC
(1) Used MKS Type 1179A Mass Flow Controller [Gas -H2/Range - 500sccm (Model#:1179A-26043 {1179A52CR1BV-S})]
* Full Scale Ranges (N2 equivalent): 500 SCCM
* Maximum Inlet Pressure: 150 psig
* Normal Operating Pressure Differential(with atmospheric pressure at the MFC outlet): 10 to 5000 sccm 10 to 40 psid
* Accuracy (including non-linearity, hysteresis, and nonrepeatability referenced to 760 mmHg and 0 C)(Calibration Gas): Analog 1.0% of F.S., Digital 1.0% of Reading; 20-100% of F.S. 0.2% F.S. , < 20% of F.S.
* Repeatability: 0.2% of F.S.
* Warm-up Time(to within 0.2% of F.S. of steady state performance): < 2 min
* Controller Settling Time (per SEMI Guideline E17-91): < 2 sec
* Pressure Coefficient: <0.02% of Rdg./psi
* Normal Operating Temperature Range: 0 C to 50 C
* Input Voltage Required: Max. at start-up (first 5 sec) 15 VDC ( 5%) @ 200 mA, Typical at steady state 15 VDC ( 5%) @ 100 mA
* Set Point Command Signal 0 to 5 VDC from <20K
* Output Signal: 0 to 5 VDC into >10K
* Connector Types: Analog 9-pin or 15-pin Type D , 20-pin card edge (The 15-pin Type "D" and card edge connectors are electronically compatible with other MKS flow controllers.Consult Applications Engineering at (***)-227-8766 for details.)Digital RS-485, DeviceNet
* Wetted Materials: Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality),316 S.S., nickel, Valve Seat Kel-F for <200 sccm, Teflon for >500 sccm configurations
* Leak Integrity: External (scc/sec He) <1 x 10-10, Through closed valve <1.0% of F.S. at 40 psig inlet to atmosphere(To assure no flow-through, a separate positive shut-off valve is recommended.)
* Fittings (compatible with): Swagelok 4 VCR , " Swagelok , surface mount
* Electromagnetic Compatibility: Fully CE Compliant to EMC Directive 2004/108/EC when used with an overall metal braided shielded cable, properly grounded at both ends.
