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> Leybold heraeus mod. Z401 etch/rie plasma system
Leybold heraeus mod. Z401 etch/rie plasma system
Leybold Heraeus Mod. Z401 Plasma Etch OR RIE Plasma tool
* suitable for experimentation, process development, or small production
* comes with cables/manuals (manuals are in German language)
* 13-5/8" dia x 14-5/8"D Stainless Steel chamber
* 5ea feedthrough/viewports located at front of chamber
* 9ea feedthrough/viewports located at back of chamber
* pneumatic load lock w/manual loading arm
* 8.25" substrate pallet, currently set up for 3ea 3" dia wafers
* 9.75" shower head, manually adjustable top electrode for gap spacing
* Up to 6ea gas inputs (no MFCs currently installed)
* Leybold Hereaus Turbovac 450 turbo pump
* ENI Mod. OEM-6 RF Generator, solid state, water cooled, 13.56MHz, 600W maximum
* Semiautomatic matching network
* Electrode bias configuration (switchable as follows):
Top Electrode Bottom Electrode
* 1ea MKS Mod. PDR-C-1B Torrmeter Power Supply Readout
* 1ea MKS Mod. 252A Throttle Valve Controller
* 1ea Leybold Mod. PM 310 Penning Vacuum Gauge
* 1ea Leybold Mod. TM 210S TC gauge
* 4ea MKS Mod. PR-3000 Mass Flow Gas Controllers
* 1ea Xinix Mod. 1012 End Point Controller, w/fiber optic cable
* 3ea Leybold Mod. BE05 manual controllers (for system components)
* 2ea Leybold Mod. DCA01 digital readout displays (Bias, Fwd, and Ref. Power)
* 1ea Leybold Mod. NT 450 turbo pump controller
* 380VAC/3Ph/50/60Hz/24A (can run on 220VAC with step up transformer, which comes with the system)
* Chilled Water: >3 gal/min, pressure 4-6 bar
* Reactor Dimensions: 36"W x 32"D x 67"H
* Controller Dimensions: 23"W x 31"D x 80"H
Please see attached pics of the OEM spec and sales sheets for more details. You can also email us if you have any questions.
- crating charge $1200/ea, packing charge (for palletizing) $420
