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High res x-y-z-t stage x-y=0.5UM z=2.5UM t=0.00004.

High Res X-Y-Z-T Stage X-Y=0.5um Z=2.5um T=0.00004.
Custom Built X-Y-Z-T Stage High Precision Stage X-Y 0.5um Z 2.5um T 0.00004 Resolution
* This custom stage is noted for it's precise resolution of movement, zero backlash on all axis and no deflection at the outer 8 inch edge.
* Resolution X: 0.5 Microns Y: 0.5 Microns
* Max Speed X: 163 m/m Sec. Y: 163 m/m Sec
* Stroke X: 263 m/m Y: 417 m/m
* Dimensions: X Stage 18 Inch x 18 Inch Y Stage 14 Inch x 12 Inch
* Resolution Z: 2.5 Micron T Deg Step 0.00004
* Max Speed Z: 31 m/m Sec. T: 10 m/m Sec.
* Chuck 8.25 Inch Diameter 11 Inch High
* 2 Each Compumotor Zeta4 Drives PN 87-014030-02A, & 87-014030-01A
* 2 Each Vexta Nano Step 5-Driver Model # DFR1507A.
* 2 Each Compumotor S83-62-MO Stepper Motors
* Drawings, Design Notes and Designer Available
* Original Cost of the X-Y Stage $17,000, Design Cost of Chuck (Z-T) $12,000, Construction Cost of Chuck $12,000, Plus Drives, Encoders, Steppers and Cabling.
High res x-y-z-t stage x-y=0.5UM z=2.5UM t=0.00004.